JPH0353294Y2 - - Google Patents

Info

Publication number
JPH0353294Y2
JPH0353294Y2 JP18877284U JP18877284U JPH0353294Y2 JP H0353294 Y2 JPH0353294 Y2 JP H0353294Y2 JP 18877284 U JP18877284 U JP 18877284U JP 18877284 U JP18877284 U JP 18877284U JP H0353294 Y2 JPH0353294 Y2 JP H0353294Y2
Authority
JP
Japan
Prior art keywords
valve
main
servo
diaphragm
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18877284U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61103604U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18877284U priority Critical patent/JPH0353294Y2/ja
Publication of JPS61103604U publication Critical patent/JPS61103604U/ja
Application granted granted Critical
Publication of JPH0353294Y2 publication Critical patent/JPH0353294Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Servomotors (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Control Of Fluid Pressure (AREA)
JP18877284U 1984-12-14 1984-12-14 Expired JPH0353294Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18877284U JPH0353294Y2 (en]) 1984-12-14 1984-12-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18877284U JPH0353294Y2 (en]) 1984-12-14 1984-12-14

Publications (2)

Publication Number Publication Date
JPS61103604U JPS61103604U (en]) 1986-07-01
JPH0353294Y2 true JPH0353294Y2 (en]) 1991-11-21

Family

ID=30746235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18877284U Expired JPH0353294Y2 (en]) 1984-12-14 1984-12-14

Country Status (1)

Country Link
JP (1) JPH0353294Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6472214A (en) * 1987-09-12 1989-03-17 Smc Corp Vacuum pressure regulator
JP4544525B2 (ja) * 2004-03-31 2010-09-15 キヤノン株式会社 バルブおよびそれを用いた燃料電池

Also Published As

Publication number Publication date
JPS61103604U (en]) 1986-07-01

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